Monitoring from the inside
Measure
O₂, RH and temperature inside FOUPs and FOSBs
Identify
air ingress and moisture excursions
Retrieve
data wirelessly for incoming QA and process improvement
Deploy
compact, battery-powered monitoring where conventional instruments cannot fit
See the conditions Understand the events
Use measured RH to inform nitrogen purge duration. Identify air ingress through changes in O₂. Review environmental history when investigating quality issues.
Designed for the journey
Contamination event detection
identify oxygen and moisture ingress
01
Storage & transport monitoring
track conditions across wafer logistics and storage
02
Process optimization
verify purge and contamination-control performance
03
Regulatory & QA documentation
support compliance records with logged data
04
Battery-powered
Wireless retrieval
1 min intervals
37 × 37 × 14 mm
